Self-affine roughness influence on the pull-in voltage in capacitive electromechanical devices

摘要

In this work we investigate the influence of self-affine roughness parameters on the pull-in voltage in capacitive microelectromechanical devices. The capacitor plate roughness is considered as self-affine type, which is described by the roughness amplitude w, the lateral correlation length xi, and the roughness exponent H. By comparing the influence of the three parameters, we confirm that not only the long-wavelength roughness parameters w and xi, but also the short-wavelength fine roughness details, as described by the roughness exponent H, play a major role. Therefore, the proper characterization of the involved surface roughness and its evolution at all relevant length scales are necessary to gauge properly the performance of associated devices. (c) 2005 American Institute of Physics.